Thin-Film Sputter Deposition for Hybrid Applications
Muralt, P.; Seidel, J. P.
1990

Details

Title Thin-Film Sputter Deposition for Hybrid Applications
Author(s) Muralt, P. ; Seidel, J. P.
Published in Vacuum
Volume 41
Issue 4-6
Pages 1400-1402
Date 1990
ISSN 0042-207X
Note Muralt, P Balzers Ag,Proc & Equipment Labs,Ch-9496 Balzers,Switzerland
Ee547
Times Cited:2
Cited References Count:3
DOI 10.1016/0042-207X(90)93969-P
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > IMX - Institute of Materials > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published

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