Thin-Film Sputter Deposition for Hybrid Applications


Published in:
Vacuum, 41, 4-6, 1400-1402
Year:
1990
ISSN:
0042-207X
Note:
Muralt, P Balzers Ag,Proc & Equipment Labs,Ch-9496 Balzers,Switzerland
Ee547
Times Cited:2
Cited References Count:3
Laboratories:




 Record created 2006-08-21, last modified 2018-03-17


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