Thin-Film Sputter Deposition for Hybrid Applications

• Published in: Vacuum (ISSN: 0042-207X), vol. 41, num. 4-6, p. 1400-1402
• Publication date: 1990

Note:

Muralt, P Balzers Ag,Proc & Equipment Labs,Ch-9496 Balzers,Switzerland

Ee547

Times Cited:2

Cited References Count:3

Reference

• LC-ARTICLE-1990-007
• doi:10.1016/0042-207X(90)93969-P

Record created on 2006-08-21, modified on 2017-05-10