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Thin-Film Sputter Deposition for Hybrid Applications

Muralt, P. ; Seidel, J. P.

Published in:
Vacuum, 41, 4-6, 1400-1402
Year:
1990
ISSN:
0042-207X
Note:
Muralt, P Balzers Ag,Proc & Equipment Labs,Ch-9496 Balzers,Switzerland
Ee547
Times Cited:2
Cited References Count:3
DOI:
10.1016/0042-207X(90)93969-P
Laboratories:
LC

Record appears in:
Scientific production and competences > STI - School of Engineering > IMX - Institute of Materials > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published



 Record created 2006-08-21, last modified 2020-07-30


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