Infoscience

Journal article

Thin-Film Sputter Deposition for Hybrid Applications

    Note:

    Muralt, P Balzers Ag,Proc & Equipment Labs,Ch-9496 Balzers,Switzerland

    Ee547

    Times Cited:2

    Cited References Count:3

    Reference

    Record created on 2006-08-21, modified on 2016-08-08

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