Fabrication and characterization of three-dimensional micro-lens arrays in sol-gel glass
2006
Details
Title
Fabrication and characterization of three-dimensional micro-lens arrays in sol-gel glass
Author(s)
Orhan, J.-B. ; Parashar, V.K. ; Sayah, A. ; Gijs, M.A.M.
Published in
Journal of Microelectromechanical Systems
Volume
15
Issue
5
Pages
1159-1164
Date
2006
Other identifier(s)
View record in Web of Science
DAR: 9468
DAR: 9468
Laboratories
LMIS2
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS2 - Microsystems Laboratory 2
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2006-08-18