We use molecular dynamics to analyze the dependence on the impact angle of the distribution of defects originated by the deposition of a Ag/sub 19/ cluster on Pd(100) at initial kinetic energies 0.1, 2, 20 and 95 eV. For increasing energy the cluster undergoes a transition from a multi-layered adsorbed structure to a two-dimensional one. Implantation of Ag atoms and promotion of Pd substrate atoms is common to all energies and angles and, for a given initial total kinetic energy, it increases with decreasing impact angle.