Processing of Graphite-Based Sacrificial Layer for Microfabrication of Low Temperature Co-fired Ceramics (LTCC)

The processing and application of graphite powder-based sacrificial layer for fabrication of microfluidic structures in LTCC is described. Such layers are produced as pastes, which are screen-printed in LTCC sheets to avoid sagging, by supporting closed, three-dimensional structures such as channels, membranes during firing. The aim of the paper is to highlight the selection of paste materials and the effects of processing conditions on the fabricated micro-fluidic components. It is seen that the complete burnout of graphite powder is the most critical stage as it is in kinetic competition with the open pore-elimination process of LTCC, which occurs at 785°C in our system.


Published in:
Sensors and Actuators A: Physical, 130-131, 560-567
Year:
2006
Keywords:
Note:
Available online: http://www.elsevier.com/wps/find/journaldescription.cws_home/504103/descr iption#description
Other identifiers:
Laboratories:




 Record created 2006-06-30, last modified 2018-01-27

External link:
Download fulltext
Postprint
Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)