LTCC thermal gas viscometer – heater module

In this work, a novel sensor for measuring the viscosity of a gas, based on the combination of a heating cavity, a pressure sensor and a meander with a high resistance to flow, all integrated in low-temperature co-fired ceramic (LTCC) technology, is presented. This paper reports the design, thermal characterisation and modelling of the heater module in quasi-stationary operation. The performance of the heater is satisfactory, and good agreement between experimental and calculated thermal properties is found. Nonetheless, some design changes are recommended, in order to improve heat transport in the heater module.

Published in:
4th European Microelectronics and Packaging Symposium - IMAPS, 61-66
Presented at:
4th European Microelectronics and Packaging Symposium - IMAPS, Terme Čatež (SI), 5/2006
©IMAPS 1ère version du module de chauffage Wobbe - mesures, calculs et critique. Les matériaux de l’enveloppe ont une conductivité thermique insuffisante : - Remplacer la colle silicone par de la brasure tendre - Utiliser un capot en alu

Note: The status of this file is: Anyone
The status of this file is: EPFL only

 Record created 2006-06-28, last modified 2020-07-30

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