LTCC thermal gas viscometer – heater module
In this work, a novel sensor for measuring the viscosity of a gas, based on the combination of a heating cavity, a pressure sensor and a meander with a high resistance to flow, all integrated in low-temperature co-fired ceramic (LTCC) technology, is presented. This paper reports the design, thermal characterisation and modelling of the heater module in quasi-stationary operation. The performance of the heater is satisfactory, and good agreement between experimental and calculated thermal properties is found. Nonetheless, some design changes are recommended, in order to improve heat transport in the heater module.
©IMAPS 1ère version du module de chauffage Wobbe - mesures, calculs et critique. Les matériaux de l’enveloppe ont une conductivité thermique insuffisante : - Remplacer la colle silicone par de la brasure tendre - Utiliser un capot en alu
Record created on 2006-06-28, modified on 2016-08-08