Integrated LTCC micro-fluidic modules - an SMT flow sensor

This paper presents a thermal flow sensor based on the calorimetric principle realized by using low temperature co-fired ceramic (LTCC) technology, where the tapes and flow channel have been structured by laser machining. A standard configuration of a calorimetric sensor consists of a heater placed above the flow channel and temperature sensitive elements arranged symmetrically downstream and upstream. The temperature difference between temperature sensitive elements (at the upstream and downstream position) acts as a measure of flow velocity. The structure and the characteristic of the sensor are demonstrated.

Published in:
15th European Microelectronics and Packaging Conference (EMPC) - IMAPS, P2.06, 577-581
Presented at:
15th European Microelectronics and Packaging Conference (EMPC) - IMAPS, Brugge (BE), 6/2005
1er article sur le débitmètre en LTCC, avant son intégration dans le micro-réacteur.

Note: The status of this file is: EPFL only

 Record created 2006-06-27, last modified 2018-01-27

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