Milinewton force sensor based on low temperature co-fired ceramic (LTCC) technology

Fabrication of a millinewton force sensor, which is based on LTCC technology as an alternative to the widely used alumina (Al2O3) is described. The new sensor, integrated with piezoresistor thick-film, has shown an increase in the sensitivity by two times compared to the alumina-based version in the first attempt. This is ascribed to the smaller elastic modulus and finer substrate thickness attainable by LTCC. Moreover design flexibility is also an important factor, which contributes to the increased sensitivity of the sensor. It is strongly expected that the device performance can further be improved, by modifying the co-fired LTCC components such as LTCC tape and the thick-film terminations.

Published in:
PhD Research in Microelectronics and Electronics - IEEE PRIME, 2, 343-346
Presented at:
PhD Research in Microelectronics and Electronics - IEEE PRIME, Lausanne (CH), 25-28.7.2005
Capteurs de force structurés - 2e article dans le domaine. 2 fichiers: article + présentation Article : ©2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

 Record created 2006-06-27, last modified 2018-01-27

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