Low temperature co-fired ceramic (LTCC) structures for sensor and fluidic applications
2004
Files
Details
Title
Low temperature co-fired ceramic (LTCC) structures for sensor and fluidic applications
Author(s)
Birol, Hansu ; Maeder, Thomas ; Jacq, Caroline ; Ryser, Peter
Published in
106th Annual Meeting & Exposition of The American Ceramics Society, Indianapolis (USA)
Conference
106th Annual Meeting & Exposition of The American Ceramics Society, Indianapolis (USA)
Date
2004
Keywords
Note
Résultats sur la structuration de membranes en LTCC avec la technique du carbone sacrificiel.
Laboratories
LPM
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LPM - Laboratory of Microengineering for Manufacturing
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-06-22