Integrated microfluidic devices based on low-temperature co-fired ceramic (LTCC) technology

This paper reviews recent developments in integrated fluidic mesosystems, based on low-temperature co-fired ceramic (LTCC) technology, in this laboratory and elsewhere. LTCC is shown to be an advantageous technique for integrated fluidic systems, due to its simplicity, low cost and ease of integration with other technologies and components (silicon, polymer, circuit boards. Also, the techniques utilized in making the structures are presented.


Published in:
4th Korea-Switzerland Joint Symposium, Materials and MEMS for Life Science Applications
Presented at:
4th Korea-Switzerland Joint Symposium, Materials and MEMS for Life Science Applications, Les Diablerets (CH)
Year:
2004
Keywords:
Note:
Revue sur le LTCC utilisé dans les applications de type méso-système
Laboratories:




 Record created 2006-06-22, last modified 2018-01-27

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