Integrated microfluidic devices based on low-temperature co-fired ceramic (LTCC) technology
This paper reviews recent developments in integrated fluidic mesosystems, based on low-temperature co-fired ceramic (LTCC) technology, in this laboratory and elsewhere. LTCC is shown to be an advantageous technique for integrated fluidic systems, due to its simplicity, low cost and ease of integration with other technologies and components (silicon, polymer, circuit boards. Also, the techniques utilized in making the structures are presented.
Keywords: technologie des couches epaisses ; thick-film technology ; technologie hybride ; films couches épaisses ; LTCC ; structuration 3D ; couche sacrificielle carbone ; membranes ; canaux ; capteurs pression ; Wobbe ; hot spot
Revue sur le LTCC utilisé dans les applications de type méso-système
Record created on 2006-06-22, modified on 2016-08-08