Automated High Accurate Optical Measurement of Microrobot Relative Displacements in Submicron range
1997
Details
Title
Automated High Accurate Optical Measurement of Microrobot Relative Displacements in Submicron range
Author(s)
Sulzmann, A. ; Jacot, J.
Published in
IPES'97
Date
1997
Keywords
Laboratories
LPM
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LPM - Laboratory of Microengineering for Manufacturing
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-06-22