000086026 001__ 86026
000086026 005__ 20190812204928.0
000086026 037__ $$aCONF
000086026 245__ $$aSpark Assisted Chemical Engraving (SACE) machining – Haptic device for the operator
000086026 269__ $$a2005
000086026 260__ $$c2005
000086026 336__ $$aConference Papers
000086026 6531_ $$aSACE
000086026 6531_ $$aGlass micro-machining
000086026 6531_ $$aRobotics
000086026 6531_ $$aMicroengineering
000086026 6531_ $$a[SACE]
000086026 700__ $$0240236$$g153210$$aSpaelter, Ulrich
000086026 700__ $$aWüthrich, Rolf
000086026 700__ $$aBleuler, Hannes$$g104561$$0240027
000086026 7112_ $$dMay 8th - 11th$$cMonpellier, France$$aInternational Conference of the European Society for Precision Engineerining and Nanotechnology (EUSPEN)
000086026 909C0 $$pLSRO$$0252016
000086026 909CO $$ooai:infoscience.tind.io:86026$$pconf$$pSTI
000086026 937__ $$aLSRO-CONF-2006-039
000086026 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000086026 980__ $$aCONF