Physical principles and miniaturization of Spark Assisted Chemical Engraving (SACE)
2004
Details
Title
Physical principles and miniaturization of Spark Assisted Chemical Engraving (SACE)
Author(s)
Hof, L.A. ; Wüthrich, Rolf ; Fujisaki, K. ; Bleuler, Hannes ; Mandin, Ph. ; Picard, G.
Published in
Proceedings of the International Workshop on Microfactories
Pages
338-343
Conference
Microfactory, Shanghai, China
Date
2004
Keywords
Laboratories
LSRO
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSRO - Robotic Systems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-06-06