000085954 001__ 85954
000085954 005__ 20190812204928.0
000085954 037__ $$aCONF
000085954 245__ $$a3D Micro structuring of glass with an AFM
000085954 269__ $$a2004
000085954 260__ $$c2004
000085954 336__ $$aConference Papers
000085954 6531_ $$aSACE
000085954 6531_ $$aglass micro-machining
000085954 6531_ $$amicroengineering
000085954 6531_ $$arobotics
000085954 6531_ $$a[SACE]
000085954 6531_ $$aAFM
000085954 700__ $$aHof, L.A.
000085954 700__ $$0241306$$g148090$$aLal, Ashwin
000085954 700__ $$0241307$$g101484$$aFujisaki, K
000085954 700__ $$aWüthrich, Rolf
000085954 700__ $$aLangen, Hans
000085954 700__ $$aBleuler, Hannes$$g104561$$0240027
000085954 7112_ $$dmay 30th-3rd June 2004$$cGlassgow, UK$$aThe 4th EUSPEN International Conference
000085954 909C0 $$pLSRO$$0252016
000085954 909CO $$ooai:infoscience.tind.io:85954$$pconf$$pSTI
000085954 937__ $$aLSRO-CONF-2006-026
000085954 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000085954 980__ $$aCONF