000085953 001__ 85953
000085953 005__ 20190812204928.0
000085953 037__ $$aCONF
000085953 245__ $$aGlass Microstructuring with Spark Assisted Chemical Engraving
000085953 269__ $$a2004
000085953 260__ $$c2004
000085953 336__ $$aConference Papers
000085953 6531_ $$aSACE
000085953 6531_ $$aglass micro-machining
000085953 6531_ $$amicroengineering
000085953 6531_ $$arobotics
000085953 6531_ $$a[SACE]
000085953 700__ $$aWüthrich, Rolf
000085953 700__ $$g104561$$aBleuler, Hannes$$0240027
000085953 7112_ $$dFebruary 1-3 2004$$cLes Diablerets, Switzerland$$aThe Fourth Korea-Switzerland Joint Symposium
000085953 909C0 $$pLSRO$$0252016
000085953 909CO $$ooai:infoscience.tind.io:85953$$pconf$$pSTI
000085953 937__ $$aLSRO-CONF-2006-025
000085953 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000085953 980__ $$aCONF