Three-dimensional microstructuring of Pyrex glass wafers by spark-assisted chemical etching
2001
Details
Title
Three-dimensional microstructuring of Pyrex glass wafers by spark-assisted chemical etching
Author(s)
Langen, Hans ; Fascio, Valia ; Wüthrich, Rolf ; Viquerat, Didier
Published in
Microrobotics and Microassembly III
Conference
Microrobotics and Microassembly III, October 29-30, 2001
Date
2001
Keywords
Other identifier(s)
View record in Web of Science
Laboratories
LSRO
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSRO - Robotic Systems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-06-06