000085951 001__ 85951
000085951 005__ 20180127195940.0
000085951 02470 $$2ISI$$a000174470300031
000085951 037__ $$aCONF
000085951 245__ $$aThree-dimensional microstructuring of Pyrex glass wafers by spark-assisted chemical etching
000085951 269__ $$a2001
000085951 260__ $$c2001
000085951 336__ $$aConference Papers
000085951 6531_ $$aSACE
000085951 6531_ $$aglass micro-machining
000085951 6531_ $$amicroengineering
000085951 6531_ $$arobotics
000085951 6531_ $$a[SACE]
000085951 700__ $$aLangen, Hans
000085951 700__ $$aFascio, Valia
000085951 700__ $$aWüthrich, Rolf
000085951 700__ $$aViquerat, Didier
000085951 7112_ $$aMicrorobotics and Microassembly III$$dOctober 29-30, 2001
000085951 909C0 $$0252016$$pLSRO
000085951 909CO $$ooai:infoscience.tind.io:85951$$pSTI$$pconf
000085951 937__ $$aLSRO-CONF-2006-023
000085951 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000085951 980__ $$aCONF