Physical Principle of Spark Assisted Chemical Micro-Etching of Glass
2004
Details
Title
Physical Principle of Spark Assisted Chemical Micro-Etching of Glass
Author(s)
Bleuler, Hannes ; Wüthrich, Rolf
Conference
International workshop on micromechatronics and micro and nano fabrication, Karlsruhe (Germany), October 5th and 6th, 2004
Date
2004
Keywords
Note
Invited Plenary lecture
Laboratories
LSRO
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSRO - Robotic Systems Laboratory
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2006-06-06