Study of Spark Assisted Chemical Engraving – Process Technology Data
2002
Details
Title
Study of Spark Assisted Chemical Engraving – Process Technology Data
Author(s)
Wüthrich, Rolf ; Fascio, Valia ; Viquerat, Didier ; Langen, Hans
Pages
265-268
Conference
International Conference of the European Society for Precision Engineering and Nanotechnology, Eindhoven
Date
2002
Keywords
Laboratories
LSRO
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSRO - Robotic Systems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-06-06