Study of Spark assisted Electrochemical Etching - Force Measurements
2000
Details
Title
Study of Spark assisted Electrochemical Etching - Force Measurements
Author(s)
Wüthrich, Rolf ; Fascio, Valia ; Viquerat, Didier ; Langen, Hans
Published in
Microfactory
Pages
201-204
Conference
International Workshop on Microfactories (IWMF 2000), Fribourg (Switzerland), October 9-10, 2000
Date
2000
Publisher
FSRM - Swiss Foundation for Research in Microtechnology
Keywords
Laboratories
LSRO
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSRO - Robotic Systems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-06-06