000085927 001__ 85927
000085927 005__ 20181203020420.0
000085927 02470 $$2ISI$$a000237312600015
000085927 037__ $$aARTICLE
000085927 245__ $$aThe current signal in Spark Assisted Chemical Engraving (SACE), what does it tell us ?
000085927 269__ $$a2006
000085927 260__ $$c2006
000085927 336__ $$aJournal Articles
000085927 500__ $$aRobotics Microengineering [SACE]
000085927 520__ $$aSpark-assisted chemical engraving (SACE) is a promising micro-machining technology for the low-cost machining of holes and channels in non-conducting materials, such as glass and some ceramics. Despite the complexity of SACE due to the interdependency of thermal, electrochemical and mechanical effects, the key data of the machining process can be obtained from only a few signals. Possible process surveillance signals are analysed and discussed. In particular, the current flowing between the electrodes is analysed. It is shown that various information can be deduced from it, such as qualitative indications of the local electrolyte temperature, differentiation between machining and non-machining and the distinction between the presence and absence of a gas film. However, so far no direct link between the current and the instantaneous material removal rate could be found. Experimental results are presented and the possibility of active process control based on current measurement is discussed.
000085927 6531_ $$aSACE
000085927 6531_ $$aGlass micro-machining
000085927 6531_ $$aRobotics
000085927 6531_ $$aMicroengineering
000085927 6531_ $$a[SACE]
000085927 700__ $$aWüthrich, Rolf
000085927 700__ $$0240236$$g153210$$aSpaelter, Ulrich
000085927 700__ $$0240027$$g104561$$aBleuler, Hannes
000085927 773__ $$j16$$tJournal of Micromechanics and Microengineering$$q779-785
000085927 909C0 $$0252016$$pLSRO
000085927 909CO $$ooai:infoscience.tind.io:85927$$pSTI$$particle
000085927 937__ $$aLSRO-ARTICLE-2006-015
000085927 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000085927 980__ $$aARTICLE