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000085920 0247_ $$2doi$$a10.1016/j.electacta.2003.12.062
000085920 02470 $$2ISI$$a000222818100041
000085920 037__ $$aARTICLE
000085920 245__ $$aSpark Assisted Chemical Engraving in the light of electrochemistry
000085920 269__ $$a2004
000085920 260__ $$c2004
000085920 336__ $$aJournal Articles
000085920 6531_ $$a[SACE]
000085920 6531_ $$aGlass micromachining
000085920 6531_ $$arobotics
000085920 6531_ $$amicroengineering
000085920 700__ $$aFascio, Valia
000085920 700__ $$aWüthrich, Rolf
000085920 700__ $$0240027$$g104561$$aBleuler, Hannes
000085920 773__ $$j49$$tElectrochimica Acta$$k22-23$$q3997-4003
000085920 909C0 $$0252016$$pLSRO
000085920 909CO $$ooai:infoscience.tind.io:85920$$pSTI$$particle
000085920 937__ $$aLSRO-ARTICLE-2006-009
000085920 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000085920 980__ $$aARTICLE