000085772 001__ 85772
000085772 005__ 20190213070427.0
000085772 037__ $$aCONF
000085772 245__ $$aPositioning, Handling and Measuring inside a Scanning Electron Microscope
000085772 269__ $$a2003
000085772 260__ $$c2003
000085772 336__ $$aConference Papers
000085772 490__ $$aRTP microrobotique
000085772 520__ $$aAbstract In this paper we present our latest developments in high precision positioning and handling systems operating inside Scanning Electron Microscopes (SEM). This work is motivated by the growing need of new instruments for the in-situ analysis of materials. In the medium terms, these instruments will permit more laboratories to accomplish complex and repetitive tests on several samples and with various tools, without the need to open the SME chamber, increasing thus productivity and improving the reliability of the analysis. The concept of a complete manipulator system, working inside a SEM chamber (Lab-In-SEM: LIS) is proposed. Then the performances of a miniature-indenter -scratch(Miniatureindenter-scratch for SEM chamber: MISS) are described and compared with the commercial instrument MTS-XP. Examples of nano-indentation and scratch operations will be described. Then we present a five degrees-of-freedom manipulator (Ztilt-5). The Ztilt-5 has a resolution of 100nm, a workspace of several cubic centimeters and can lift weight up to 300 g. Its geometrical model has been implemented on a PC-based controller allowing telemanipulation, and joint or task spaces control. The Ztilt-5 is powered with a new type of piezo-actuators.
000085772 6531_ $$a[HPR-MR]
000085772 6531_ $$amicroengineering
000085772 6531_ $$anano-mechanical testing
000085772 6531_ $$anano-positioning
000085772 6531_ $$arobotics
000085772 6531_ $$ascanning electron microscope
000085772 700__ $$aMazerolle, S.
000085772 700__ $$aRabe, R.
000085772 700__ $$aVaridel, T.
000085772 700__ $$0241133$$aBreguet, J.-M.$$g104634
000085772 7112_ $$a6èmes Journées du Pôle Microrobotique, 2èmes Journées du RTP Microrobotique$$cBourges, France$$d3 and 4 Decembre 2003
000085772 8564_ $$s534303$$uhttps://infoscience.epfl.ch/record/85772/files/Bourges%20RTP%202003.pdf$$zn/a
000085772 909C0 $$0252016$$pLSRO
000085772 909CO $$ooai:infoscience.tind.io:85772$$pSTI$$pconf
000085772 937__ $$aLSRO-CONF-2006-017
000085772 973__ $$aEPFL$$rNON-REVIEWED$$sPUBLISHED
000085772 980__ $$aCONF