Leroy, Christine
Pisani, Marcelo B.
Hibert, Cyrille
Bouvet, Didier
Puech, M.
Ionescu, Adrian M.
High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates
Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
2006
2006
Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Conference Papers
11993