000085620 001__ 85620
000085620 005__ 20180318102456.0
000085620 02470 $$2DAR$$a11993
000085620 037__ $$aCONF
000085620 245__ $$aHigh Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates
000085620 269__ $$a2006
000085620 260__ $$c2006
000085620 336__ $$aConference Papers
000085620 700__ $$aLeroy, Christine
000085620 700__ $$0240911$$g152113$$aPisani, Marcelo B.
000085620 700__ $$0240233$$g135282$$aHibert, Cyrille
000085620 700__ $$0240266$$g100552$$aBouvet, Didier
000085620 700__ $$aPuech, M.
000085620 700__ $$aIonescu, Adrian M.$$g122431$$0241430
000085620 7112_ $$dApril 2006$$cStresa, Italy$$aDTIP 2006
000085620 773__ $$tProceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
000085620 909CO $$pconf$$pSTI$$ooai:infoscience.tind.io:85620
000085620 909C0 $$0252177$$pNANOLAB$$xU10328
000085620 909C0 $$0252168$$pCMI$$xU10383
000085620 937__ $$aCMI-CONF-2006-001
000085620 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000085620 980__ $$aCONF