000083882 001__ 83882
000083882 005__ 20180317095346.0
000083882 037__ $$aSTUDENT
000083882 245__ $$aFabrication and characterisation of ultrasensitive monocrystalline silicon cantilevers with integrated magnetic tips
000083882 269__ $$a2006
000083882 260__ $$c2006
000083882 336__ $$aStudent Projects
000083882 520__ $$aDuring this project, ultrasensitive cantilevers designed for nuclear magnetic resonance applications were fabricated and characterised. The cantilevers are 500, 340 or 200 μm long, 10 or 20 μm wide and 500 or 340 nm thick and integrate a thin film of cobalt at the free end. This thin-film can be magnetised. Their fabrication requires novel techniques such as silicon-on-insulator technology, Al protective layer deposition, high anisotropic dry etching or HF-vapour release. A dynamic and a static model of the cantilevers were elaborated. The models describe the behaviour of the cantilevers when actuated by an external magnetic field in the air and in vacuum.
000083882 700__ $$aDysli, Alain
000083882 8564_ $$zURL
000083882 8564_ $$s825591$$uhttps://infoscience.epfl.ch/record/83882/files/Dysli_Master_abstract.pdf$$zn/a
000083882 909CO $$ooai:infoscience.tind.io:83882$$pSTI
000083882 909C0 $$0252040$$pLMIS1$$xU10321
000083882 937__ $$aLMIS1-STUDENT-2006-001
000083882 973__ $$aEPFL$$sPUBLISHED
000083882 980__ $$aSTUDENT$$bMASTERS