NANOSCALE DISPENSING OF LIQUIDS WITH AFM-CANTILEVER

The demand for tools suitable for deposition of small amount of material is continuously increasing. A standard SiN cantilever was modified in order to dispense single droplets of femto- and ato-liter (NAnoscale DISpensing (NADIS)). In order to open a nano fluid channel, holes down to 100 nm were milled in the apex of the cantilever using FIB. The liquid to dispense is loaded on the top-side of the cantilever extremity.


Year:
2006
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2006-03-20, last modified 2018-03-17

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