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MONOLITHIC INTEGRATION OF NANOMECHANICAL RESONATORS WITH CMOS CIRCUITRY: FULL-WAFER NANOPATTERNING BY NANOSTENCIL LITHOGRAPHY
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MONOLITHIC INTEGRATION OF NANOMECHANICAL RESONATOR[...]
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Arcamone, J
et al
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Arcamone_Julien_CMI_2006
version 1
Arcamone_Julien_CMI_2006.pdf
[1.28 MB]
27 Jan 2018, 12:26
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