An 8x4 avalanche diode array in a 0.8μm CMOS process uses single photon counting for time-of-light range finding with 100ps 40mW decollimated laser pulses. An accuracy of 618μm is achieved from 15cm to 1m with 10e4 pulses.
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Title
A CMOS single photon avalanche diode array for 3D imaging