Several DSA (dimensionally stable anode) coatings were prepd. by thermal decompn. of metal chloride salts on a Ti base. The painting compn. does not necessarily correspond to the final coating compn. Thermogravimetric and x-ray fluorescence measurements were used to identify and characterize the material losses. The IrO2, Ta2O5, and RuO2 compds. can be deposited with .apprx.100% yield, while SnO2 and Pt precursors give high material losses. The influence of parameters affecting the deposition yield is discussed. [on SciFinder (R)]