Conducting thin films of ruthenium oxide prepared by MOCVD
1998
Details
Title
Conducting thin films of ruthenium oxide prepared by MOCVD
Author(s)
Hones, P. ; Kohli, C. H. ; Sanjines, R. ; Levy, F. ; Gerfin, T. ; Gratzel, M.
Published in
Materials Research Society Symposium Proceedings
Volume
514
Issue
Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits
Pages
479-484
Date
1998
Other identifier(s)
View record in Web of Science
Laboratories
LPI
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > ISIC - Institute of Chemical Sciences and Engineering > LPI - Laboratory of Photonics and Interfaces
Peer-reviewed publications
Work produced at EPFL
Book chapters
Published
Peer-reviewed publications
Work produced at EPFL
Book chapters
Published
Record creation date
2006-02-21