Loading...
report
NANOINGENEERING OF SIN MEMBRANES USING FIB
2005
Applications of thin SixNy membranes may be found in miscellaneous fields such as MEMS and NEMS as well as biotechnology. FIB is an excellent tool in order to realize nano-structures on membranes achieving the ultimate limits and rapid prototyping.
Loading...
Name
Santschi_Christian_CMI_2005_02.pdf
Access type
restricted
Size
376.67 KB
Format
Adobe PDF
Checksum (MD5)
7cde9c4853632cb0111e9bc9758c9b09