NANOINGENEERING OF SIN MEMBRANES USING FIB
Santschi, Ch; Takano, N; van den Boogaart, M A F; Grogg, D; Danelon, Ch; Vogel, H; Brugger, J
2005
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Abstract

Applications of thin SixNy membranes may be found in miscellaneous fields such as MEMS and NEMS as well as biotechnology. FIB is an excellent tool in order to realize nano-structures on membranes achieving the ultimate limits and rapid prototyping.

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Title NANOINGENEERING OF SIN MEMBRANES USING FIB
Author(s) Santschi, Ch ; Takano, N ; van den Boogaart, M A F ; Grogg, D ; Danelon, Ch ; Vogel, H ; Brugger, J
Date 2005
Laboratories LMIS1
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Technical Reports
Published
Record creation date 2006-02-17

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