NANOINGENEERING OF SIN MEMBRANES USING FIB

Applications of thin SixNy membranes may be found in miscellaneous fields such as MEMS and NEMS as well as biotechnology. FIB is an excellent tool in order to realize nano-structures on membranes achieving the ultimate limits and rapid prototyping.


Year:
2005
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2006-02-17, last modified 2018-03-17

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