Infoscience

Report

NANOINGENEERING OF SIN MEMBRANES USING FIB

Applications of thin SixNy membranes may be found in miscellaneous fields such as MEMS and NEMS as well as biotechnology. FIB is an excellent tool in order to realize nano-structures on membranes achieving the ultimate limits and rapid prototyping.

    Reference

    • LMIS1-REPORT-2006-006

    Record created on 2006-02-17, modified on 2016-08-08

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