000078623 001__ 78623
000078623 005__ 20180317095345.0
000078623 037__ $$aREP_WORK
000078623 245__ $$aMICROFABRICATED HALL SENSORS ON SU-8 CANTILEVERS
000078623 269__ $$a2005
000078623 260__ $$c2005
000078623 336__ $$aReports
000078623 520__ $$aA technology for the fabrication of bismuth Hall sensors integrated on SU-8 cantilevers has been developed in this project. Hall sensors with active area of 2 x 2 μm2 (Fig.2) are produced with lift-off and resized to 200 x 200 nm2 (Fig.3) with the FIB. SU-8 cantilevers containing the sensors are characterized as well as the magnetic properties of the sensors.
000078623 700__ $$0240035$$aMouaziz, S$$g149010
000078623 700__ $$0240034$$aBoero, G$$g110635
000078623 700__ $$0241021$$aPopovic, R S$$g106136
000078623 700__ $$0240120$$aBrugger, J$$g145781
000078623 700__ $$aScandella, L
000078623 8564_ $$s146025$$uhttps://infoscience.epfl.ch/record/78623/files/Mouaziz_Schahrazede%20_CMI_2005.pdf$$zn/a
000078623 909CO $$ooai:infoscience.tind.io:78623$$preport$$pSTI
000078623 909C0 $$0252040$$pLMIS1$$xU10321
000078623 937__ $$aLMIS1-REPORT-2006-002
000078623 973__ $$aEPFL$$sPUBLISHED
000078623 980__ $$aREPORT