000078623 001__ 78623
000078623 005__ 20190316233638.0
000078623 037__ $$aREP_WORK
000078623 245__ $$aMICROFABRICATED HALL SENSORS ON SU-8 CANTILEVERS
000078623 269__ $$a2005
000078623 260__ $$c2005
000078623 336__ $$aReports
000078623 520__ $$aA technology for the fabrication of bismuth Hall sensors integrated on SU-8 cantilevers has been developed in this project. Hall sensors with active area of 2 x 2 μm2 (Fig.2) are produced with lift-off and resized to 200 x 200 nm2 (Fig.3) with the FIB. SU-8 cantilevers containing the sensors are characterized as well as the magnetic properties of the sensors.
000078623 700__ $$0240035$$g149010$$aMouaziz, S
000078623 700__ $$0240034$$g110635$$aBoero, G
000078623 700__ $$0241021$$g106136$$aPopovic, R S
000078623 700__ $$aBrugger, J$$g145781$$0240120
000078623 700__ $$aScandella, L
000078623 8564_ $$uhttps://infoscience.epfl.ch/record/78623/files/Mouaziz_Schahrazede%20_CMI_2005.pdf$$zn/a$$s146025
000078623 909C0 $$xU10321$$0252040$$pLMIS1
000078623 909CO $$qGLOBAL_SET$$pSTI$$ooai:infoscience.tind.io:78623$$preport
000078623 937__ $$aLMIS1-REPORT-2006-002
000078623 973__ $$sPUBLISHED$$aEPFL
000078623 980__ $$aREPORT