Precision Manipulators operating inside Scanning Electron Microscopes
2004
Details
Title
Precision Manipulators operating inside Scanning Electron Microscopes
Author(s)
Mazerolle, S. ; Rabe, R. ; Varidel, T. ; Bergander, A. ; Breguet, J-M.
Published in
Nanofair
Conference
Nanofair 2004, St- Gallen, Switzerland, 14-16 September
Date
2004
Keywords
Laboratories
LSRO
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSRO - Robotic Systems Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-02-02