The Laboratory in Scanning Electron Microscope concept: Lab-in-SEM

• Presented at: MECHROB 2004, Aachen, Germany, September 13-15
• Published in: Mechatronics & Robotics 2004, num. Part IV, p. 1362-1367
• Publication date: 2004

Keywords: [HPR-MR] ; Lab-in-SEM ; Piezo positioning ; micro handling ; nano-materials testing ; SEM

Reference

• LSRO2-CONF-2006-006

Record created on 2006-02-02, modified on 2017-05-10