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The Laboratory in Scanning Electron Microscope concept: Lab-in-SEM

Breguet, J.-M. ; Mazerolle, S. ; Rabe, R.

Published in:
Mechatronics & Robotics 2004, Part IV, 1362-1367
Presented at:
MECHROB 2004, Aachen, Germany, September 13-15
Year:
2004
Keywords:
[HPR-MR] ; Lab-in-SEM ; Piezo positioning ; micro handling ; nano-materials testing ; SEM
Laboratories:
LSRO

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LSRO - Laboratory of robotics systems
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published



 Record created 2006-02-02, last modified 2020-10-25


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