000064538 001__ 64538
000064538 005__ 20190812204906.0
000064538 037__ $$aCONF
000064538 245__ $$aHigh Precision Robotics System for Scanning Electron Microscopes
000064538 269__ $$a2004
000064538 260__ $$c2004
000064538 336__ $$aConference Papers
000064538 520__ $$aIn this paper we present our latest developments in high precision positioning and handling systems operating inside an SEM. The Laboratory in Scanning Electron Microscope concept (LAB-in-SEM) is proposed along with a description of our piezodriven manipulators. Nano-material testing such as in-situ indentation and scratch have been conduct with our systems and are briefly related here. Finally, the preliminary tests of the tele-operated assembly of carbon nanotubes on AFM tips are described.These results will permit the development of an automatic nanotubes assembly system.
000064538 6531_ $$a[HPR-MR]
000064538 6531_ $$aPrecision actuators
000064538 6531_ $$aSEM
000064538 6531_ $$aNano tubes manipulation
000064538 6531_ $$aMaterial testing
000064538 700__ $$aMazerolle, S.
000064538 700__ $$aRabe, R.
000064538 700__ $$aFahlbusch, S.
000064538 700__ $$aMichler, J.
000064538 700__ $$g104634$$aBreguet, J.-M.$$0241133
000064538 7112_ $$dOctober 2004$$cShanghai, China$$aIWMF 2004
000064538 773__ $$j1$$t4th International Workshop on Microfactories$$q17-22
000064538 909C0 $$pLSRO$$0252016
000064538 909CO $$ooai:infoscience.tind.io:64538$$pconf$$pSTI
000064538 937__ $$aLSRO2-CONF-2006-005
000064538 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000064538 980__ $$aCONF