“Pocket Factory”: Concept of miniaturized modular cleanrooms

The manipulation and assembly of microsystems (MEMS) require accurate robots operating in a clean room environment. Available systems are bulky, thus requiring large ground surface for small components. Furthermore they have limited accuracy. The main objective of the 'Pocket-factory' project is to develop miniaturized and modular clean production units for microsystems and establish a methodology to quickly set them up

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1st Topical Meeting on Microfactories "Desktop MEMS and Nano Factories" TMMF2005, Tsukuba, Japan, 17-19 October 2005

 Record created 2005-12-13, last modified 2018-01-27

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