Fabrication of polysilicon gated-nanowires and their application for pA precision current measurements


Published in:
Digest of Technical Papers of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), 1, 859-862
Presented at:
13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), Seoul, Korea, June 5-9
Year:
2005
Laboratories:




 Record created 2005-12-06, last modified 2018-03-18


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