AFM imaging with an xy-micropositioner with integrated tip
Indermühle, P.-F.; Jaecklin, V. P.; Brugger, J; Linder, C; de Rooij, N F; Binggeli, M.
1995

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Abstract

We have fabricated an xy-microstage with integrated protruding tip and electrostatic comb actuators for scanning probe surface imaging. This device, which is micromachined in monocrystalline silicon, nas been actuated and characterized and, for the first time with a such a microtool, an atomic force microscope (AFM) profile has been achieved.

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Title AFM imaging with an xy-micropositioner with integrated tip
Author(s) Indermühle, P.-F. ; Jaecklin, V. P. ; Brugger, J ; Linder, C ; de Rooij, N F ; Binggeli, M.
Published in Sensors and Actuators A
Volume 46-47
Pages 562-565
Date 1995
DOI https://doi.org/10.1016/0924-4247(94)00962-H
Laboratories LMIS1
SAMLAB
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date 2005-11-02

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