Design and fabrication of an overhanging xy-microactuator with integrated tip for scanning surface profiling

This paper presents a microsystem consisting of an overhanging xy-microstage with integrated tip and comb actuators for scanning surface profiling. The design is optimized with respect to precise xy positioning at low drive voltages and accurate detection of vertical deflection. The structure is micromachined in monocrystalline silicon, requiring only three masks and combining various techniques such as KOH and sacrificial layer etching, silicon fusion bonding and wet isotropic and dry anisotropic etching.


Published in:
Sensors and Actuators A, 43, 1-3, 346-350
Year:
1994
Laboratories:




 Record created 2005-11-02, last modified 2018-03-17

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