Details
Title
Nanofabrication by shadow deposition through nanostencils
Author(s)
Brugger, J ; Kim, G
Published in
Nanolithography and patterning techniques in microelectronics
Series
Woodhead Publishing in Materials
Pages
218-237
Date
2005
Publisher
Cambridge, Woodhead Publishing Limited
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Book chapters
Published
Work produced at EPFL
Book chapters
Published
Record creation date
2005-11-02