Micromechanical testing of SU-8 cantilevers

SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.


Published in:
Fatigue and Fracture of Engineering Materials and Structures, 28, 8, 735-742
Year:
2005
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 Record created 2005-11-02, last modified 2018-03-17

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