000058424 001__ 58424
000058424 005__ 20181203015901.0
000058424 037__ $$aARTICLE
000058424 245__ $$aPhotoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould
000058424 269__ $$a2003
000058424 260__ $$c2003
000058424 336__ $$aJournal Articles
000058424 520__ $$aPolymers have the ability to conform to surface contours down to a few nanometres. We studied the filling of transparent epoxy-type EPON SU-8 into nanoscale apertures made in a thin metal film as a new method for polymer/metal near-field optical structures. Mould replica processes combining silicon micromachining with the photo-curable SU-8 offer great potential for low-cost nanostructure fabrication. In addition to offering a route for mass production, the transparent pyramidal probes are expected to improve light transmission thanks to a wider geometry near the aperture. By combining silicon MEMS, mould geometry tuning by oxidation, anti-adhesion coating by self-assembled monolayer and mechanical release steps, we propose an advanced method for near-field optical probe fabrication. The major improvement is the possibility to fabricate nanoscale apertures directly on wafer scale during the microfabrication process and not on free-standing tips. Optical measurements were performed with the fabricated probes. The full width half maximum after a Gaussian fit of the intensity profile indicates a lateral optical resolution of approximate to 60 nm.
000058424 6531_ $$amicroscopy
000058424 6531_ $$atips
000058424 6531_ $$aoxidation
000058424 6531_ $$ascale
000058424 700__ $$0240644$$aKim, GM$$g149003
000058424 700__ $$aKim, BJ
000058424 700__ $$aTen Have, ES
000058424 700__ $$aSegerink, F
000058424 700__ $$aVan Hulst, NF
000058424 700__ $$0240120$$aBrugger, J$$g145781
000058424 773__ $$j209$$k3$$q267-271$$tJournal of Microscopy
000058424 8564_ $$s369689$$uhttps://infoscience.epfl.ch/record/58424/files/KimGM_2003_Jmicroscop.pdf$$zn/a
000058424 909C0 $$0252040$$pLMIS1$$xU10321
000058424 909CO $$ooai:infoscience.tind.io:58424$$pSTI$$particle
000058424 937__ $$aLMIS1-ARTICLE-2003-001
000058424 970__ $$aISI:000181652300022/LMIS1
000058424 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000058424 980__ $$aARTICLE