Fabrication of a novel microsystem for the electrical characterisation of cell array
We have designed and realised a new type of microsystem for the electrical characterisation of arrays of living cells for biomedical diagnostic purposes. We have used deep plasma etching for the fabrication of microholes and micro-fluidic channels in silicon substrates. After oxidation and electrical contact fabrication, these structured silicon wafers have been anodically bonded with Pyrex wafers. The fabrication is completed by the gluing of micro-patterned polyimide foils on top of the silicon. We have tested the electrical characteristics of our microsystems using NaCl salt solutions of various molarities. We believe that our device will open new perspectives for biochemical sensor applications.