Oblique Powder Blasting for Three-dimensional Micromachining of Brittle Materials

We present oblique powder blasting as a three-dimensional micromachining technology for brittle materials. Powder blasting is a microfabrication process, based on the use of a pressurised air beam containing eroding Al2O3 particles. By varying the angle of incidence of the incoming particles to a substrate, covered by a mask, one can exploit the oblique slopes of micropatterned holes and mask underetching phenomena to generate new options for three-dimensional microstructuring. We have identified and quantified the role of secondary rebounding particles in mask underetching.


Published in:
Sensors and Actuators A, 92, 358-363
Year:
2001
Keywords:
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 Record created 2005-10-26, last modified 2018-03-17

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