Nanoreplication of diffractive optical devices in Spin-on-Glass (SOG) technology
2001
Details
Title
Nanoreplication of diffractive optical devices in Spin-on-Glass (SOG) technology
Author(s)
Sayah, A. ; Parashar, V.K. ; Gijs, M.A.M.
Conference
TOP NANO 21, Second Annual Report
Date
2001
Laboratories
LMIS2
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS2 - Microsystems Laboratory 2
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2005-10-26