000055955 001__ 55955
000055955 005__ 20180317094803.0
000055955 0247_ $$2doi$$a10.1109/MEMSYS.2002.984322
000055955 037__ $$aCONF
000055955 245__ $$aMicro-replication of Optical Lenses in Glass using Sol Gel Technology
000055955 269__ $$a2002
000055955 260__ $$c2002
000055955 336__ $$aConference Papers
000055955 520__ $$aA new method to realize arrays of micro-lenses using a sol gel glass replication technology is presented. Polydimethyl-siloxane (PDMS) master  structures are used for the replication of thin glass membranes, which, by an appropriate annealing procedure, result in converging lenses with positive meniscus. Hereby, we exploit PDMS - sol gel surface interactions and thickness dependent changes in composition of the sol gel solution. The lenses are realized on a circular and square like basis. We characterize the micro-lenses by an optical imaging system and measure their focal length as a function of lens thickness and size. Also spherical aberration effects are measured.
000055955 6531_ $$amicro-replication
000055955 6531_ $$alenses
000055955 6531_ $$asol gel
000055955 700__ $$0240260$$aSayah, A.$$g110149
000055955 700__ $$0240574$$aParashar, V. K.$$g145754
000055955 700__ $$0242801$$aGijs, M. A. M.$$g113762
000055955 7112_ $$aMEMS 2002, 15th International IEEE Micro Electro Mechanical Conference$$cLas Vegas, Nevada, USA$$d20-24 january
000055955 8564_ $$s446291$$uhttps://infoscience.epfl.ch/record/55955/files/48.pdf$$zn/a
000055955 909CO $$ooai:infoscience.tind.io:55955$$pSTI$$pconf
000055955 909C0 $$0252094$$pLMIS2$$xU10322
000055955 917Z8 $$x148230
000055955 937__ $$aLMIS2-CONF-2002-001
000055955 970__ $$a48/LMIS2
000055955 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000055955 980__ $$aCONF