Microfabrication of high-aspect ratio and complex monolithic structures in glass
2002
Details
Title
Microfabrication of high-aspect ratio and complex monolithic structures in glass
Author(s)
Belloy, E. ; Pawlowski, A.G. ; Sayah, A. ; Gijs, M.A.M.
Published in
Journal of Microelectromechanical Systems
Volume
11
Pages
521-527
Date
2002
Other identifier(s)
View record in Web of Science
Laboratories
LMIS2
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS2 - Microsystems Laboratory 2
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2005-10-26