New results on powder blasting techniques applied to the manufacture of piezocomposite structures
Wilm, M.; Clatot, S.; ayah, A.; Robert, L.; Daniau, W.; Gijs, M.; Ballandras, S.
2002

Abstract

We present the last results concerning investigation of powder blasting techniques to micromachined complex-patterned piezoelectric composite transducers. This technology consists of a beam of eroding powder particles, etching an in-situ-masked PZT plate. We manufacture honeycomb-patterned structures, which can not be achieved with a standard saw-dicing technique.

Details

Title New results on powder blasting techniques applied to the manufacture of piezocomposite structures
Author(s) Wilm, M. ; Clatot, S. ; ayah, A. ; Robert, L. ; Daniau, W. ; Gijs, M. ; Ballandras, S.
Published in Proceedings of the Ultrasonics Symposium
Volume 2
Pages 1115-1118
Conference IEEE Ultrasonics Symposium, Munich, Germany, October 8-11, 2002
Date 2002
ISBN 0-7803-7582-3
DOI https://doi.org/10.1109/ULTSYM.2002.1192489
Laboratories LMIS2
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS2 - Microsystems Laboratory 2
Conference Papers
Work produced at EPFL
Published
Record creation date 2005-10-26

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